Tutorial on Extreme UV (EUV) sources and lasers

posted Aug 15, 2011, 10:22 PM by Anand Asundi   [ updated Aug 27, 2011, 5:21 AM by Anand Asundi ]
Date: Thursday 25 August 2011
Time 1:00 pm - 5:30 PM
Location - Fusion@MAE Seminar Room (Block N3.1-B3c-06) (MAP)

EUV sources and lasers are an essential component of the drive to achieve small structures as well as measure sub-50 nm devices and components. There are two schools of thoughts in the development of these sources - one uses Higher Harmonic Generation (HHG) and the other uses Plasma Focus Device for generating EUV light amongst others. In this tutorial two experts in the field - Dr Andrius Baltuska, Photonics Institute, Vienna University of Technology and  Dr Rajdeep Rawat from NIE, Singapore will provide us with a short tutorial on
these technologies and developments.

See attached file for details


12:30 - 13:00   Registration
15:00 -15:30     Tea Break

Registration Form:

Anand Asundi,
Aug 17, 2011, 9:24 PM
Anand Asundi,
Aug 15, 2011, 10:39 PM